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LEGENDSシリーズ

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RTP

Etch

PVD

Etch, PVD

Ion Implant

CPT

AGHeatpulse

  • 4100
  • 8108
  • 8800

AutoEtch

  • 490 Oxide
  • 590 Poly
  • 690 Metal
  • 790 Tungsten

Eclipse

  • Star
  • Mark II
  • Mark IV

900 Thin Film Etch

  • 901ACS™
  • 903ACS™
  • 981ACS™

6500 Thin Film Etch

  • 6510 HRe-™
  • 6520 HRe-™
  • 6540 HRe-™

Sputtered Films Endeavor™ PVD

  • Endeavor EUV™
  • Endeavor AT™

AMS™ PVD

Sunset Platforms

  • 120XP
  • 160XP
  • 350D
  • E-Series

Chemical Process Technology

  • Cintillio SAT
  • Cintillio SOT
  • Cintillio SST
  • STORM
  • SRD
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